Rigid conformal polishing tool using non-linear visco-elastic effect
نویسندگان
چکیده
منابع مشابه
Parametric smoothing model for visco-elastic polishing tools.
A parametric smoothing model is developed to quantitatively describe the smoothing action of polishing tools that use visco-elastic materials. These materials flow to conform to the aspheric shape of the workpieces, yet behave as a rigid solid for short duration caused by tool motion over surface irregularities. The smoothing effect naturally corrects the mid-to-high frequency errors on the wor...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.002242